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Publications in Journal of Vacuum Science and Technology A

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2018

Kobayashi E, Boccard M, Jeangros Q, Rodkey N, Vresilovic D, Hessler-Wyser A, Döbeli M, Franta D., De Wolf S, Morales-Masis M, Ballif C,
Amorphous gallium oxide grown by low-temperature PECVD,
Journal of Vacuum Science and Technology A Vol. 36 (2018) 021518