I. Fodchuk, S. Balovsyak

New possibilities for determination of solids surface parameters by X-ray reflectivity

Physica Status Solidi A 204 (2007) 1543–1554

New possibilities for research on solids surface morphology by X-ray reflectivity (XRR) methods are presented. The method for reconstruction of surface geometry fragments is suggested. A series of GaAs crystals with a periodic surface relief and SiO₂ plates with a random surface relief are investigated as test samples. Correlation of parameters of the XRR curves and surface relief with the results of atomic-force microscopy is refined. The algorithms of the XRR curves calculation and surface-profile reconstruction are complemented. The fractal approach to describing the shape of the XRR curves and surface profiles is used.

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Cited Articles

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