I. Fodchuk, S. Balovsyak
New possibilities for determination of solids surface parameters by X-ray reflectivity
Physica Status Solidi A 204 (2007) 1543–1554
New possibilities for research on solids surface morphology by X-ray reflectivity (XRR) methods are presented. The method for reconstruction of surface geometry fragments is suggested. A series of GaAs crystals with a periodic surface relief and SiO2 plates with a random surface relief are investigated as test samples. Correlation of parameters of the XRR curves and surface relief with the results of atomic-force microscopy is refined. The algorithms of the XRR curves calculation and surface-profile reconstruction are complemented. The fractal approach to describing the shape of the XRR curves and surface profiles is used.
Cited Articles
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Holý V., Kuběna J., Ohlídal I., Lischka K., Plotz W.,
X-ray reflection from rough layered systems,
Physical Review B 47 (1993) 15896–15903