Gui Yun Tian, Rong Sheng Lu, Duke Gledhill
Surface measurement using active vision and light scattering
Optics and Lasers in Engineering 45 (2007) 131–139
This paper reviews the recent progress in surface measurement methods using active vision and light-scattering techniques. The active vision methods with different structured light patterns and the corresponding techniques are summarized. The surface roughness and defects inspection with light-scattering are discussed. After the review, an integrative method to measure surface waviness and form, roughness is proposed.
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Klapetek P., Ohlídal I., Navrátil K.,
Atomic force microscopy analysis of statistical roughness of GaAs surfaces originated by thermal oxidation,
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