H.-U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, H. Kunzmann

Advances in scanning force microscopy for dimensional metrology

CIRP Annals: Manufacturing Technology 55 (2006) 841–878

This paper presents the state of the art in scanning force microscopy for dimensional metrology. A detailed description is given of the important factors affecting the major components of a scanning force microscope from the metrological point of view. Both instrument design and calibration are discussed together with an overview of industrial applications. Recent achievements by national metrology institutes and others to improve calibration procedures, traceability, reduce measurement uncertainty, ensure consistancy of measurement and broaden the range of applications are described.

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