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Miroslav Ohlídal, Ivan Ohlídal, Daniel Franta, Aleš Michálek

Proc: Method of shearing interferometry for characterizing non-gaussian randomly rough surfaces

Proceedings of Specification, Production, and Testing of Optical Components and Systems, Specification, Production, and Testing of Optical Components and Systems (1996) pp.442–451

Published by Published by SPIE – The International Society for Optical Engineering, Bellingham, Washington, USA

In this paper a method of shearing interferometry enabling us to perform a characterization of the basic statistical properties of non-gaussian randomly rough surfaces of solids will be described. This method is based on a statistical analysis of the form of dark fringe centres taking place in interferograms obtained by using a suitable interference microscope. By means of the method the root-mean-square (RMS) values of heights and slopes, the values of autocorrelation lengths, autocorrelation coefficients of the heights and autocorrelation coefficient of the slopes of surface irregularities of glass diffusers will be determined.

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