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Lenka Zajíčková, S Ptasinska, M Cingel, Štefan Matejčík

Proc: Study of Electron Impact Ionization and Electron Attachment to HMDSO

Proceedings of 15th Symposium on Application of Plasma Processes and 3rd EU–Japan Joint Symposium on Plasma Processing (2005) pp.263-264

Published by Comenius University, Slovak Academy of Science and Union of Slovak Matematicians and Physicists, Bratislava, Slovakia

Electron impact ionization and electron attachment reactions for the hexamethyldisiloxane (HMDSO) molecule has been studied in gas phase using crossed electron/molecular beams apparatus. Appearance energies of particular positive ions have been estimated. Electron attachment reactions have been found very ineffective.

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