## Ivan Ohlídal, Daniel Franta, Petr Klapetek

# Proc: Atomic force microscopy measurements of surface roughness quantities important in optics of surfaces and thin films

## Proceedings of 4th Seminar on Quantitative Microscopy, PTB-Bericht, 4th Seminar on Quantitative Microscopy, PTB-Bericht (2000) pp.124-131

## Published by Published by PTB, Braunschweig, SRN

In this paper AFM measurements of the statistical quantities of randomly rough surfaces important in optics are presented. The procedures enabling us to determine the values of the RMS value of the heights, RMS value of the slopes, autocorrelation function of the heights, power spectral density function, one-dimensional distribution of the probability density of the heights and one-dimensional distribution of the probability density of the slopes of the irregularities of roughness of these surfaces on basis of the AFM data are described. An illustration of these procedures is performed using the results achieved for randomly rough surfaces of silicon. A comparison of these AFM results with those obtained for the same samples by the optical method is also introduced in this paper.

You may also contact one of the authors: ohlidal@physics.muni.cz, franta@physics.muni.cz