Ivan Ohlídal, Miroslav Ohlídal, Daniel Franta, Martin Vičar, Petr Klapetek
Proc: Comparison of AFM and optical methods at measuring nanometric surface roughness
Proceedings of 3th Seminar on Quantitative Microscopy, 3th Seminar on Quantitative Microscopy (1998) pp.123–129
Published by Published by PTB, Braunschweig, SRN
In this contribution a comparison of the values of basic quantities characterizing random nanometric surface roughness determined by AFM and optical methods is presented.
You may also contact one of the authors: ohlidal@physics.muni.cz, franta@physics.muni.cz