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Ivan Ohlídal, Miroslav Ohlídal, Daniel Franta, Martin Vičar, Petr Klapetek

Proc: Comparison of AFM and optical methods at measuring nanometric surface roughness

Proceedings of 3th Seminar on Quantitative Microscopy, 3th Seminar on Quantitative Microscopy (1998) pp.123–129

Published by Published by PTB, Braunschweig, SRN

In this contribution a comparison of the values of basic quantities characterizing random nanometric surface roughness determined by AFM and optical methods is presented.

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