Petr Klapetek, Vilma Buršíková, Miroslav Valtr

Proc: Scanning probe microscopy analysis of delaminated thin films

PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY (2007) pp.576-581

Published by IOP PUBLISHING LTD

In this article the results of atomic force microscopy (AFM) and scaning thermal microscopy (SThM) of delaminated thin films are presented. It is shown that SThM data can be used for a very precise localisation of the delaminated areas that is necessary for the analysis of film material properties. Moreover, by using AFM it is also possible to characterize morphology of the blister upper boundary with a high resolution too. The quantitative results obtained by the above mentioned methods are compared with nanoindentation measurements.

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