Lenka Zajíčková, Marek Eliáš, Vilma Buršíková, Jan Janča, Martin Lorenz

Proc: Deposition of CNx films in inductively coupled RF discharge

Proceedings of 24th International Conference on Phenomena in Ionized Gases, 24th International Conference on Phenomena in Ionized Gases (1999) pp.41-42

Published by Polish Acad. of Science

CARBON NITRIDE FILMS; LASER-ABLATION

You may also contact one of the authors: lenkaz@physics.muni.cz, mareke@physics.muni.cz, vilmab@physics.muni.cz