Ivan Ohlídal, Daniel Franta, Jaroslav Hora
Proc: Spectroscopic Ellipsometry of Slightly Rough Surfaces Covered by Layers
Proceedings of 6th European Conference on Applications of Surface and Interface Analysis, 6th European Conference on Applications of Surface and Interface Analysis (1996) pp.823-826
Published by John Willey & Sons, Chichester, England, UK
In this paper it will be shown that formulae for the ellipsometric parameters derived using the Rayleigh–Rice theory (RRT) can be used to determine the root-mean-square (rms) values of the heights σ and the values of the autocorrelation lengths T.
You may also contact one of the authors: ohlidal@physics.muni.cz, franta@physics.muni.cz