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Vilma Buršíková, Pavel Dvořák, Lenka Zajíčková, Daniel Franta, Jan Janča, Jiří Buršík, Olga Bláhová, Vratislav Peřina, Petr Klapetek

Proc: Silicon-oxide Containing Diamond-like Carbon Coatings Prepared Using Plasma Enhanced Chemical Vapor Deposition

Proceedings of International Workshop on the Application of Nanocrystalline Diamond and Diamond Like Carbon Materials (2006) pp.311-315

Published by Saha Institute of Nuclear Physics, Kolkata, India

Diamond-like carbon coatings with various silicon-oxide content were deposited on different substrate materials (silicon, glass, polycarbonate and steel) in capacitively coupled r.f. discharge (13.56 MHz). The structure of the prepared films was studied with infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectric function of the films was determined from ellipsometric measurements in the range 1.5–5.2 eV. Matrix Assisted Laser Desorption-Ionisation – Time of Flight Mass Spectrometry (MALDI-TOF) was used to study the deposited films. The mechanical properties of prepared coatings (e.g. hardness, elastic modulus, fracture toughness, coating/substrate adhesion etc.) were studied by means of depth sensing indentation technique using Fischerscope H100 tester. The tribological properties were studied using CSM pin-on-disc tester. The effect of intrinsic stress on the coating properties was investigated. The variation in SiOx content enabled to minimize the intrinsic compressive stress in coatings. Analysis of the evolved crack morphology by means of optical microscopy, scanning electron microscopy (SEM) and atomic force microscopy (AFM) revealed a significant increase in interfacial fracture toughness for the DLC:SiOx films compared to the pure DLC films. On the basis of above described investigation nanocomposite multilayer coatings with enhanced mechanical properties (high hardness, adhesion, fracture toughness, low intrinsic stress) were prepared.

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