Šarunas Meškinis, Kestutis Šlapikas, Rimas Gudaitis, Sigitas Tamulevičius, Vitoldas Kopustinskas, A. Guobienë, Gediminas Niaura

Sio(x)-doped DLC films: Charge transport, dielectric properties and structure

Vacuum 82 (2008) 617-622

In the present study, SiOx-doped diamond-like carbon (DLC) films were synthesized by ion beam deposition on different substrates. Electrical properties, morphology and structure of the DLC films were investigated. Poole-Frenkel emission was the main carrier transport mechanism in all investigated metal-SiOx-doped DLC-metal samples. Dielectric properties of the samples were dependent on both the bottom and top electrode metal. The trans-polyacetylene chain vibrations detected from the Raman spectra have been observed for all the SiOx-doped DLC films. Different dielectric properties of the film deposited onto the different metal interlayers were explained both by different roughness of the metal films and by different structure of the ion beam-synthesized SiOx-doped DLC films. (c) 2007 Elsevier Ltd. All rights reserved.

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