Marian Mikula, Branislav Grancic, Vilma Buršíková, Adrian Csuba, Milan Drzik, Stefan Kavecky, Andrej Plecenik, Peter Kus

Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering

Vacuum 82 (2007) 278-281

Superhard titanium diboride (TiB2) coatings (H-v > 40 GPa) were deposited in Ar atmosphere from stoichiometric TiB2 target using an unbalanced direct current (d. c.) magnetron. Polished Si (001), stainless steel, high-speed steel (HSS) and tungsten carbide (WC) substrates were used for deposition. The influence of negative substrate bias, U-s, and substrate temperature, T-s, on mechanical properties of TiB2 coatings was studied. X-ray diffraction (XRD) analysis showed hexagonal TiB2 structure with (0 0 0 1) preferred orientation. The texture of TiB2 coatings was dependent upon the ion bombardment (U-s increased from 0 to -300V) and the substrate heating (T-s increased from room temperature (RT) to 700 degrees C). All TiB2 coatings were measured using microhardness tester Fischerscope H100 equipped with Vickers and Berkovich diamond indenters and exhibited high values of hardness H-v up to 34GPa, effective Young's modulus E ^* = E/(1-v) ranging from 450 to 600 GPa; here E and v are the Young's modulus and Poisson's ratio, respectively, and elastic recovery W-e approximate to 80%. TiB2 coating with a maximum hardness H-v approximate to 73 GPa and E ^* approximate to 580 GPa was sputtered at U-s = -200 V and T-s = RT. Macrostresses of coatings a were measured by an optical wafer curvature technique and evaluated by Stoney equation. All TiB2 coatings exhibited compressive macrostresses. (C) 2007 Elsevier Ltd. All rights reserved.

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