Yuriy Pihosh, Hynek Biederman, Danka Slavínská, J. Kousal, Andrei Choukourov, M. Trchova, Anna Macková, A. Boldyreva

Composite SiOx/hydrocarbon plasma polymer films prepared by RF magnetron sputtering of SiO2 and polyethylene or polypropylene

Vacuum 81 (2006) 32-37

Composite SiOx/hydrocarbon plasma polymer films have been prepared by RF sputtering of silica and hydrocarbon polymer (polyethylene (PE) or polypropylene (PP)) targets placed on two balanced magnetrons. The morphology and composition of the composite films have been analysed by means of AFM, RBS/ERDA, FTIR, and XPS. The obtained films demonstrated wide range of wettability and hardness in dependence on the preparation conditions. When the ratio of RF powers delivered to the individual targets P-SiO2/P-PE(P-PP) changed from 0.1 to 10 the static contact angles of water varied from 75 degrees to 25 degrees and from 80 degrees to 33 degrees for composite films obtained from PE and PP, respectively. The hardness of the composite films varied from 2400 to 3400 N/mm(2) and from 1600 to 2000 N/mm(2) for the above-mentioned cases, respectively. Peculiar properties of the composite SiOx/hydrocarbon plasma polymer films have been discussed with respect to the elemental composition and nature of the chemical bonds established on the surface of the films. (c) 2006 Elsevier Ltd. All rights reserved.

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