Ivan Ohlídal, Karel Navrátil
Influence of the properties of thin films on the determination of the relative reflectance of a randomly rough surface
Thin Solid Films 31 (1976) 223–234
In the determination of the relative reflectance of a randomly rough surface, it is argued in this paper that the measured value of the relative reflectance is influenced by the difference in the optical properties of the thin films used to cover the reference sample on the one hand and the test sample on the other. The influence of the variation in thickness and refractive index of the two films (i.e the variation in optical thickness) is studied. Using numerical examples it is also shown that, for a randomly rough silicon surface, relatively small differences in the above-cited parameters can have a considerable influence on the difference between the measured and true relative reflectances. A procedure is discussed for excluding this influence. In conclusion, an experimental method for determining the true value of the relative reflectance of a randomly rough silicon surface is demonstrated for the system Si-SiO2.
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