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Sergei Starostine, Eugen Aldea, Hindrik de Vries, M. Creatore, Mauritius C. M. van de Sanden

Atmospheric Pressure Barrier Discharge Deposition of Silica-Like Films on Polymeric Substrates

Plasma Processes and Polymers 4 (2007) S440-S444

Silica-like coatings were deposited on polymer foils in APG discharge in a roll-to-roll configuration. The dependence of film structure and chemical composition on the conditions during deposition process was studied by means of SEM, ATR-FTIR, and XPS analysis. The influence of oxidant concentration on the deposited film properties is analyzed and discussed. It was observed that pulsing of the APG discharge suppresses dust formation in atmospheric plasma and, therefore, provides uniform coatings.

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