Ivan Ohlídal, Jiří Vohánka, Vilma Buršíková, Daniel Franta, Martin Čermák
Spectroscopic ellipsometry of inhomogeneous thin films exhibiting thickness non-uniformity and transition layers
Optics Express 28 (2020) 160-174
In this paper the complete optical characterization of an inhomogeneous polymer-like thin film of SiOxCyHz exhibiting a thickness non-uniformity and transition layer at the lower boundary is performed using variable angle spectroscopic ellipsometry. The Campi-Coriasso dispersion model was utilized for describing the spectral dependencies of the optical constants of the SiOxCyHz thin film and transition layer. The multiple-beam interference model was used for expressing inhomogeneity of the SiOxCyHz thin film. Thickness non-uniformity of this film was taken into account by means of the averaging of the elements of the Mueller matrix performed using the thickness distribution for the wedge-shaped non-uniformity. The spectral dependencies of the optical constants of the SiOxCyHz thin film at the upper and lower boundaries together with the spectral dependencies of the optical constants of the transition layer were determined. Furthermore, the thickness values of the SiOxCyHz film and transition layer, profiles of the optical constants of the SiOxCyHz thin film and the rms value of local thicknesses corresponding to its thickness non-uniformity were determined. Thus, all the parameters characterizing this complicated film were determined without any auxiliary methods.
DOI: 10.1364/OE.28.000160
You can also contact one of the authors: ohlidal@physics.muni.cz, vohanka@physics.muni.cz, vilmab@physics.muni.cz, franta@physics.muni.cz, 63855@mail.muni.cz