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Petr Klapetek, Andrew Yacoot, Václav Hortvík, Václav Duchoň, Herve Dongmo, Simon Rerucha, Miroslav Valtr, David Nečas

Multiple fibre interferometry setup for probe sample interaction measurements in atomic force microscopy

Measurement Science and Technology 31 (2020) 094001

Atomic force microscopy (AFM) often relies on assumption that cantilever bending can be described by a simple beam theory and that the displacement of the tip can be evaluated from the cantilever angle. Some more advanced metrology instruments are using free space or fibre interferometers for measuring the position of cantilever apex directly, which itself is a large simplification of the metrological traceability chain. The next logical development, covering measurements of both the cantilever apex position and its deformation due to lateral forces acting during different AFM measurement regimes is presented in this paper. It is based on using a set of closely packed fibre interferometers that can be used to determine localised bending of the cantilever at different positions along the cantilever. This can be used for detection of cantilever deformation beyond the classical beam theory and can yield both better understanding of uncertainty sources in individual AFM force-distance measurements and more accurate scanning in the constant height mode in high-speed AFM applications.

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DOI: 10.1088/1361-6501/ab85d8

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