LJ Ward, WCE Schofield, JPS Badyal, AJ Goodwin, PJ Merlin

Atmospheric pressure glow discharge deposition of polysiloxane and SiOx films

Langmuir 19 (2003) 2110-2114

Hydrophobic polysiloxane-like thin films have been deposited onto polyethylene by introducing octamethyleyclotetrasiloxane and tetramethyleyclotetrasiloxane precursors through an ultrasonic atomizer into an atmospheric pressure glow discharge. Enrichment of the gas feed with oxygen gives rise to the formation of hydrophilic SiOx coatings which exhibit an improvement in gas barrier.

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Cited Articles

1. Zajíčková L., Janča J., Peřina V.,
   Characterization of Silicon Oxide Thin Films Deposited by Plasma Enhanced Chemical Vapour Deposition from Octamethylcyclotetrasiloxane/Oxygen Feeds,
   Thin Solid Films 338 (1999) 49–59