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Jana Musilová, Ivan Ohlídal

Influence of defects of thin films on determining their thickness by the method based on white light interference

Journal of Physics D 25 (1992) 1131–1138

The usefulness of the thin film thickness determination method based on the principle of white light interference could be limited not only by parameters characterizing the optical system itself (optical constants of the measured and reference systems, the measured thickness of the thin film of interest) but also by other additional effects such as inhomogeneity of optical constants of the measured film, roughness of the boundaries and the existence of surface or interface layers. These effects are discussed.

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