Jana Musilová, Ivan Ohlídal

Possibilities and limitations of the film thickness determination method based on white light interference

Journal of Physics D 23 (1990) 1227–1238

The usefulness of the film thickness determination method based on the principle of white light interference is tested numerically in a wide range of optical constants and thicknesses of a thin film of interest. Numerous cases occurring in practice are included. The factors which could influence the results obtained by the method are analysed. Some limitations of the method are found resulting from both experimental errors and the factors discussed.

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