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Ivan Ohlídal

Immersion spectroscopic reflectometry of multilayer systems. II. Experimental results

Journal of the Optical Society of America A 5 (1988) 465–470

The methods of immersion spectroscopic reflectometry presented in the preceding paper [J. Opt. Soc. Am. A 5,459 (1988)] are employed for the complete optical analysis of typical nonabsorbing single, double, and triple layers. It is shown that these methods are suitable for analyzing such systems from the practical point of view. Advantages of these methods are outlined, and comparisons with other optical methods are made.

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