R Vladoiu, V Ciupina, C. Surdu-Bob, CP Lungu, Jan Janik, J. D. Skalny, Vilma Buršíková, Jiří Buršík, G Musa

Properties of the carbon thin films deposited by thermionic vacuum arc

Journal of Optoelectronics and Advanced Materials 9 (2007) 862-866

The aim of the present paper is to investigate the properties of the Diamond Like Carbon (DLC) film condensation from the carbon plasma generated by Thermionic Vacuum Arc (TVA) method. The carbon film is bombarded during its deposition by energetic carbon ions with established value of directed energy. Because this system can heat at elevated temperature any material, it is one of the most adequate technologies for the deposition of refractory metals with high melting points (over 3000 K), Raman spectra were analysed to identify the C phase of the deposited films and SEM (Scanning Electron Microscope) used after the nanoindentation print of different loads. Mechanical tests were carried on deposited carbon film using a Fischerscope depth sensing indentation tester. The hardness of the deposited films was found in the range of 10 to 14 GPa, typical values for DLC films and the elastic modulus was found in the range from 100 to 125 GPa.

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