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Miloslav Ohlídal, Marek Unčovský, Ivan Ohlídal, Daniel Franta

Determination of the basic parameters characterizing the roughness of metal surfaces by laser light scattering

Journal of Modern Optics 46 (1999) 279–293

A method of determination of the basic morphology parameters of rough metal surfaces with periodic and random components of surface roughness by means of laser light scattering is presented. The method is based on interpreting the angular distribution of the laser light intensity scattered from such surfaces. The theory of the method is based on the scalar theory of diffraction and basic theorems of data processing. The new, more general way of interpreting experimental data is specified. It can also be used for the analysis of samples with quasiperiodic and random components of surface roughness; this is the case when standard measurement by means of stylus profilometer can give incorrect results.

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