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David Nečas, Lenka Zajíčková, Daniel Franta, Pavel Sťahel, Petr Mikulík, Mojmír Meduňa, Miroslav Valtr

Optical characterization of ultra-thin iron and iron oxide films

e-Journal of Surface Science and Nanotechnology 7 (2009) 486–490

Ultra-thin films of 57Fe deposited on silicon substrates and SiOxCyHz support layers and subsequently oxidized in laboratory atmosphere are studied by two optical methods: the combination of UV/VIS/NIR spectroscopic ellipsometry and spectrophotometry, used to find layer thicknesses and optical constants, and X-ray specular reflectometry, used to obtain the electron density depth profile. The results of both methods are compared and found to be in a relatively good agreement.

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DOI: 10.1380/ejssnt.2009.486

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