David Nečas, Lenka Zajíčková, Daniel Franta, Pavel Sťahel, Petr Mikulík, Mojmír Meduňa, Miroslav Valtr
Optical characterization of ultra-thin iron and iron oxide films
e-Journal of Surface Science and Nanotechnology 7 (2009) 486–490
Ultra-thin films of 57Fe deposited on silicon substrates and SiOxCyHz support layers and subsequently oxidized in laboratory atmosphere are studied by two optical methods: the combination of UV/VIS/NIR spectroscopic ellipsometry and spectrophotometry, used to find layer thicknesses and optical constants, and X-ray specular reflectometry, used to obtain the electron density depth profile. The results of both methods are compared and found to be in a relatively good agreement.
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