Zuzana Kučerová, Lenka Zajíčková, Ondřej Jašek, Marek Eliáš, Richard Ficek, Radimír Vrba, František Matějka, Jiřina Matějková, Jiří Buršík
Carbon Nanotubes Synthesized by Plasma Enhanced CVD: Preparation for Measurements of Their Electrical Properties
Czechoslovak Journal of Physics 56 (2006) B1244–B1249
The present paper reports a preparation of carbon nanotubes (CNTs) for their electrical conductivity measurements. It describes the formation of a chip, on which the measurements are to be realized, the deposition of CNTs in microwave torch at atmospheric pressure and the preparation of a nanotube-containing solution that is used for placing separated nanotubes on the chip. The chip for the measurement of electrical conductivity was prepared on polished silicon wafers using several deposition techniques and electron beam lithography. Carbon nanotubes were synthesized in the mixture of argon, methane and hydrogen on the silicon substrate with SiO2 overlayer and a thin top iron film serving as a catalyst. The deposited samples were composed of dense standing nanotubes with iron nanoparticles on their top ends. These nanoparticles were encased by amorphous carbon which resulted in some cases in a compact incrustation covering the nanotubes. Scanning electron microscopy (SEM) studies of dried water droplets on polished silicon wafers reveal the presence of three different area: the center with heavy particles, the middle part with few nanotubes and lighter objects and the edge with many overlayered nanotubes.
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