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Jana Franclová, Vilma Buršíková

Poole-Frenkel conductivity in SiOxHyCz coatings prepared by PECVD

Czechoslovak Journal of Physics 56 (2006) B1146-BA1149

The aim of the present work is to investigate the electrical properties of SiOxHyCz coatings prepared in a capacitively coupled r.f. glow discharge (13.56 MHz) from mixtures of hexamethyldisiloxane (HMDSO) and oxygen under several different deposition conditions. V-A characteristics of the films were measured. All electrical measurements were performed in a separate vacuum system at a pressure of 10(-1) Pa and the temperature varied from 237 K to 286 K. Complex analysis of the obtained I-V data was done. It is well known that SiOxHyCz coatings prepared by plasma enhanced chemical vapor deposition (PECVD) exhibit Poole-Frenkel conductivity, although space-charge-limited conductivity has been occasionally also observed.

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