Jan Čech, Pavel Sťahel, Martin Šíra, Vilma Buršíková, Zdeněk Navrátil, David Trunec, A. Brablec

Thermal stability of coatings prepared in atmospheric pressure glow discharge

Czechoslovak Journal of Physics 54 (2004) C872-C876

In order to better understand the relations between the deposition conditions, the microstructure and hydrogen and/or nitrogen incorporation in polymeric films the thermal stability of coatings prepared in atmospheric pressure glow discharge was studied. The polymeric films were prepared from the mixture of hexamethyldisiloxane (HMDSO) or hexamethyldisilazane (HMDSZ) with nitrogen in atmospheric pressure glow discharge (APGD). The hydrogen and/or nitrogen evolved from polymeric films were studied by ther.

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You can also contact one of the authors: vilmab@physics.muni.cz, trunec@physics.muni.cz