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Lenka Zajíčková, Pavel Dvořák, Vít Kudrle, Radek Šmíd

Study of Mode Transition in Low Pressure Capacitive RF Discharges in Nitrogen

Czechoslovak Journal of Physics 52 (2002) 427–432

We observed two types of a capacitively coupled rf discharge in nitrogen-unconfined and confined mode. The modes differed significantly not only in a visual appearance but also in the dc self-bias voltage at the driven electrode, the plasma potential and the average electron energy. The ion energy distribution measured in the unconfined mode showed structure typical for the grounded electrode and lower pressure. The ion energy agreed relatively well with the results on the plasma potential.

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