Lukáš Kelar, Vilma Buršíková, Pavel Sťahel, Zdenek Bochnicek, Vratislav Peřina, Jiří Buršík

PREPARATION AND CHARACTERISATION OF CARBON FILMS PREPARED FROM HMDSZ/METHANE/NITROGEN OR HYDROGEN MIXTURE USING PECVD

Chemické listy 102 (2008) S1478-S1481

You can also contact one of the authors: vilmab@physics.muni.cz

Cited Articles

1. Zajíčková L., Buršíková V., Peřina V., Macková A., Janča J.,
   Correlation Between SiOx Content and Properties of DLC : SiOx Films Prepared by PECVD,
   Surface and Coatings Technology 174 (2003) 281–285